| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-91 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00 |
| filingDate |
2009-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1dbc8e227a4dca124432e47390d4f32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bdeba161a810bdde0b0cc297a17746f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_786a3d48aff89e7d8d2b6200f9d53bb8 |
| publicationDate |
2010-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010118302-A1 |
| titleOfInvention |
Method and apparatus for detecting foreign materials and storage medium |
| abstract |
A foreign material detecting method for detecting a foreign material attached to a substrate surface includes a spraying step of spraying an organic solvent or an oil-phase material containing a halogen element to the substrate surface, a condensing step of emphasizing the foreign material by condensing the sprayed organic solvent or oil-phase material around the foreign material attached to the substrate surface by controlling a temperature of the substrate surface, and a surface inspecting step of detecting the foreign material emphasized by the condensation of the organic solvent or the oil-phase material by a surface inspecting device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10133265-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8210742-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010018332-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111554601-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111554601-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I616961-B |
| priorityDate |
2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |