| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G47-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67781
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67196
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6773
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67766
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67733
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67703
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67775
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67769
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67736
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67772
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67225 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2018-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-7185461-B2 |
| titleOfInvention |
SUBSTRATE PROCESSING APPARATUS AND CONTROL METHOD FOR SUBSTRATE PROCESSING APPARATUS |
| priorityDate |
2018-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |