| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S414-141
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S414-135
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-905 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67173
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2002-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_103f7da302f77c65b924e9bcbf2701c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b1a9815764f9fc4e295759de4ef5c5e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6eb4286092af85fbad25c75eb4175e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b39b7f33f4720c617f53359c5f10db7 |
| publicationDate |
2007-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I290861-B |
| titleOfInvention |
A method and apparatus for processing a wafer |
| abstract |
A method of a single wafer wet/dry cleaning apparatus comprising: a transfer chamber having a wafer handler contained therein; a first single wafer wet cleaning chamber directly coupled to the transfer chamber; and a first single wafer ashing chamber directly coupled to the transfer chamber. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I760024-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I511799-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I579955-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I473663-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I622100-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114548708-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114548708-B |
| priorityDate |
2001-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |