http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120127606-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67161 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q3-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68735 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate | 2011-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20120127606-A |
| titleOfInvention | Pedestal cover |
| abstract | According to the present invention, a novel semiconductor processing pedestal and examples of devices comprising such a pedestal are described. In particular, these pedestals are configured to reduce the complexity and / or frequency of constantly transferring and maintaining heat to the semiconductor substrate. Specifically, the pedestal may include a removable cover located over the metal plate of the pedestal. The removable cover is configured to maintain a constant and uniform temperature profile of the surface facing the substrate, although the upper surface of the plate supporting the cover and in thermal communication with the cover may have a much lower uniform temperature profile. The removable cover can be made of a specific ceramic material and can be formed into a thin plate. These materials are resistant to the processing environment and maintain thermal properties over multiple process cycles. The removable cover can be easily removed from the plate and replaced with a new cover without having to disassemble the entire device. |
| priorityDate | 2011-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.