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filingDate 2015-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102256632-B1
titleOfInvention Light emitting device and e-beam evaporating apparatus manufacturing the same
abstract The light emitting device of the embodiment includes a light emitting structure including a first conductivity type semiconductor layer, an active layer, and a second conductivity type semiconductor layer; And first and second electrodes disposed on the first and second conductivity-type semiconductor layers, respectively. Wherein the light emitting structure includes a first mesa region, the first conductivity type semiconductor layer includes a second mesa region, and the first electrode includes a first region that is a partial region of an upper surface of the second mesa region; A second area that is a side of the second mesa area; And a third area extending from an edge of a side surface of the second mesa area. And, the thickness ratio of the first region d1, the second region d2, and the third region d3 is d1:d2:d3 = 1: 0.9 to 1.1: 1, and is formed in the first electrode layer. The improved step coverage can improve the productivity and optical properties of the manufacturing process.
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Total number of triples: 44.