patentipc/H01L21-465

http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-465

Outgoing Links

Predicate	Object
title	Chemical or electrical treatment, e.g. electrolytic etching
label	H01L21/465
sameAs	http://data.epo.org/linked-data/def/ipc/H01L21-465 http://www.wipo.int/classifications/ipc/ipcpub/?notion=scheme&symbol=H01L0021465000
broader	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461

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Total number of triples: 846.