| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-465
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-184
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1832
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-465
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0296 |
| filingDate |
1981-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1986-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1986-01-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3114309-C2 |
| titleOfInvention |
Method for manufacturing infrared detector elements |
| abstract |
The invention relates to a method for etching HgCdTe, PbSnTe or InSb. The previously common chemomechanical etching process is being replaced by a spray etching process. |
| priorityDate |
1981-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |