http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4756794-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b94d2715cda37c1f23e48f9f4f23422
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-465
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-465
filingDate 1987-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1988-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39c43e71cdbe59f7973d209a24a3abef
publicationDate 1988-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-4756794-A
titleOfInvention Atomic layer etching
abstract An apparatus, and method therefor, for removing a single atomic layer fromhe surface of a crystalline diamond. In a preferred embodiment, the apparatus comprises: a first delivery system for flooding the surface of the diamond with a pulse of nitrogen dioxide during a first phase of operation to cause a monolayer of nitrogen oxide to be adsorbed to the surface of the diamond; and a second delivery system for impacting the surface of the diamond with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation in order to remove a single atomic layer from the surface of the diamond. In a preferred method for removing a single atomic layer from the surface of a crystalline diamond, the method comprises the steps of: flooding the diamond surface with a pulse of nitrogen dioxide during the first phase of operation; and impacting the diamond surface with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation in order to remove a single atomic layer from the surface of the diamond.
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