http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100540862-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-18 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-465 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-465 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461 |
| filingDate | 2001-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100540862-B1 |
| titleOfInvention | Method for manufacturing diffractive optical component for laser of ZnSe polycrystal |
| abstract | When reactive ion etching is applied to a ZnSe polycrystalline substrate, the reactive gas used therein is a chlorine-based gas that does not contain hydrocarbon groups. Or the reactive gas is a gas prepared by mixing a chlorine-based gas containing another hydrocarbon group with another gas. Other gases include inert gases or gases that do not react with ZnSe. BCl 3 gas is one type of chlorine-based gas. Ar gas is one kind of inert gas. RF power is one means of activating a gas.n n n n ZnSe polycrystals, diffractive optical components, reactive ion etching, chlorine-based gases, surface roughness, surface uniformity. |
| priorityDate | 2000-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.