Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_76ba102ea9c02b6633d64bf09c5b89a4 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-028 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-24 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-465 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61B5-0478 |
filingDate |
2006-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_450b77f35734eac4edf6df36c8689a48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20703f3da7dfd727d349e10bf5a31dc2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45527ddd87d67de0f0dd4f373c2c90c8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85800f51b8e5bc624c311ec8d918525d |
publicationDate |
2009-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2009318824-A1 |
titleOfInvention |
Neuralprobe and methods for manufacturing same |
abstract |
A neural probe and method of fabricating same are provided. The probe comprises a plurality of frames connected to each other and to a substrate by respective bimorphs. A probe base is connected by another bimorph to the frames. A probe tip extends from the probe base. The probe can achieve a large vertical motion and out-of-plane curling. The probe can operate according to three modes. The first mode pertains to a large-signal motion for tuning in single-unit neuronal activity. The second pertains to a small-signal motion with lock-in amplifier that increases SNR. The third pertains to burst small-signal motion for clearing tissue responses. Fabrication of a neural probe begins with a processed CMOS chip. Post-CMOS processing incorporates self-aligned selective nickel plating and sacrifices two aluminum layers. The fabrication technique produces a neural probe in which the sensing elements are in close proximity to CMOS circuitry. The fabrication technique obviates the need for post-CMOS masks, alignment, or assembly. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102373658-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9549708-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9889304-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013010161-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10966620-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11266830-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7805175-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9192767-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11123548-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11167126-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10441779-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10952627-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10406350-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9440082-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012277834-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008297135-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008200967-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8007726-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9925376-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11311718-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9474894-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9604055-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10065031-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11738192-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10166392-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9241651-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210098079-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9072906-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9403011-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11730953-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008008626-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11766560-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8774937-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9572985-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10201707-B2 |
priorityDate |
2005-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |