| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_696ca0ae93d5cf5a686273601361781f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00539 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-465 |
| filingDate |
2005-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e54f6e2dd1cd969a2038d7521dd360f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b987a658a4ff54cfd12727c62f545117 |
| publicationDate |
2014-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I430353-B |
| titleOfInvention |
Anisotropic etchant composition and etching method for manufacturing microstructure of germanium |
| priorityDate |
2004-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |