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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c13a9242430dab2645fe19a4984c226b
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publicationDate 2016-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20160119808-A
titleOfInvention Selective, electrochemical etching of a semiconductor
abstract A multi-layer structure comprising a semiconductor layer, the semiconductor layer comprising a dopant and having increased conductivity; Selectively increasing the porosity of the semiconductor layer using electrochemical processing and at least partially utilizing the increased conductivity of the semiconductor layer to selectively increase the porosity; At least in part, removing the semiconductor layer having the selectively increased porosity from the multi-layer structure. By way of example, selectively increasing the porosity may include, at least in part, selectively anodizing the semiconductor layer of the multi-layer structure.
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