| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cd1b30f173285a12c950bfbaeebfa67d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44acc6ee9ef676d4140a69351b29864d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b8872f69c25be5c14f9f75593be437b7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76849
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-465
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 |
| filingDate |
2005-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e55a0c10b98971819ac2157ed27344e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b99c5bd44fb8ff7963a1c73aa4e0bf8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b2676ee9de4f1441d323c3ce6748128 |
| publicationDate |
2006-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2006172529-A1 |
| titleOfInvention |
Uniform passivation method for conductive features |
| abstract |
The top surfaces of conductive features are treated with a treatment solution before forming a passivation layer over the conductive features. The treatment solution includes a cleaning solution and a chemical grafting precursor. The treatment solution may also include a leveling and wetting agent to improve coverage uniformity of the chemical grafting precursor. The method results in a uniform passivation layer formed over conductive features across a surface of a workpiece. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11515154-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010051831-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022130660-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007066057-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007066059-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007066058-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007062408-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7611988-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7611987-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7615491-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7410899-B2 |
| priorityDate |
2005-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |