| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3fad27b68483f021f0bc4e4084c836ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0fdc55c8e783833f2767d3d534cc332
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb3c8445d41252d6b736344841b46683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1093fee02f3be805e77552acd88eed40 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-465 |
| filingDate |
2011-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01a9fa7271ded8e55a1a586ed95581fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eda9a8efcfd7ab1ecfb7311b806f0323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fa04446d13d89bfe9e4ad6acb48592e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe46292b0fd77625d29b3e07414b33d7 |
| publicationDate |
2012-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012205045-A1 |
| titleOfInvention |
Semiconductor machine and cleaning process thereof |
| abstract |
A semiconductor machine and a cleaning process are provided. The semiconductor machine includes a chamber and a cleaning module. The cleaning process includes the following steps. Firstly, the semiconductor machine is used to perform a semiconductor manufacturing process, wherein a titanium-based material is etched in the semiconductor manufacturing process. Then, a cleaning task is activated to clean the semiconductor machine by using a cleaning agent including a gas mixture of a fluoride compound and oxygen. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015109412-A |
| priorityDate |
2011-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |