http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70341
Outgoing Links
| Predicate | Object |
|---|---|
| concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| level | 10^^<http://www.w3.org/2001/XMLSchema#integer> |
| symbol | G03F7/70341 |
| modified | 2023-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| title | Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply |
| type | http://data.epo.org/linked-data/def/cpc/SubGroup |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70216 |
Incoming Links
Total number of triples: 862.