| abstract |
Suitable additives that may be added into immersion fluids, immersion fluids comprisingnat least one carrier medium selected from an aqueous fluid, a non-aqueous fluid,nand mixtures thereof, and immersions fluids comprising at least one carrier medium and atnleast one additive useful for performing immersion lithography at an operating wavelengthnranging from 140 nm to 365 nm are disclosed herein. |