| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-2034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D17-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-26 |
| filingDate |
2000-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0d194281e17cdc35798fc0c054fa18d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebc82024a4558a0f4a9d99f197c5c2a0 |
| publicationDate |
2000-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6120978-A |
| titleOfInvention |
Use of N,N-dialkyl ureas in photoresist developers |
| abstract |
This invention provides water-based photoresist developer/electronics cleaning compositions manifesting reduced equilibrium and dynamic surface tension by the incorporation as surfactant of an effective amount of certain N,N-dialkyl urea compounds of the structure where R and R' are independently C1 to C6 alkyl or cycloalkyl with the sum of the carbon atoms in both R and R' being 6 to 12. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2762976-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007196773-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006154186-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008264672-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007299176-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1557721-A2 |
| priorityDate |
2000-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |