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publicationDate 2011-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7892722-B2
titleOfInvention Pattern forming method
abstract A pattern forming method includes (a) a step of forming a resist film on a substrate, (b) a pre-wet step of spreading a pre-wet solution on the resist film and after a fixed time, removing the pre-wet solution, and (c) a step of subjecting the resist film on the substrate to exposure through an immersion liquid.
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