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filingDate 2020-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_926b08cd2f1681877250ba029f56b2fb
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publicationDate 2020-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20200089226-A
titleOfInvention Novel onium salt, chemically amplified resist composition, and patterning process
abstract A novel onium salt of formula (1) below, and a chemically amplified resist composition comprising it as PAG are provided. When processed by photolithography using a KrF or ArF excimer laser, EB or EUV, the resist composition is highly sensitive, has less acid diffusion, improves exposure margin, MEF and LWR.
priorityDate 2019-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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