http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008062393-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70916
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70341
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70925
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-42
filingDate 2006-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4905e58f91035b2af8016e95daa33e18
publicationDate 2008-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2008062393-A1
titleOfInvention Lithographic apparatus and device manufacturing method
abstract A system to recycle immersion fluid in an immersion fluid lithographic apparatus is described. A recycling path comprising a plurality of parallel paths, each of which has its own parallel liquid treatment unit optimized to treat fluid which is directed through it, is disclosed.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009185149-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008117392-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012013866-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8675172-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9330912-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8045135-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8629970-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009177177-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7692765-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008198344-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104950586-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9213246-B2
priorityDate 2006-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007252960-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5610683-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4346164-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005074704-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009273768-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008129970-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128726141
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7044

Total number of triples: 34.