| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ef01e33058cf740cf2197991be97af1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70341
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-708 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-32 |
| filingDate |
2006-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1664ba16565d6a706a6b22bbf84b0738
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f63e751f397b3a99cc21e52f4bb7592
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_899ae7ab0e6f8ad5f4694ff7425cbb3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef4a01f9aa2739ec8c513e6c53224eb4 |
| publicationDate |
2009-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009273768-A1 |
| titleOfInvention |
Liquid for immersion exposure, method of purifying the same,and immersion exposure method |
| abstract |
A saturated hydrocarbon compound is brought into contact at least with a first adsorbent and a second adsorbent to obtain a liquid for immersion exposure containing the saturated hydrocarbon compound with a purity of 99.5 wt % or more. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008062393-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8848162-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009190106-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7826030-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011025993-A1 |
| priorityDate |
2005-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |