| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70341
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70725
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70716
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70733 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2009-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a84d58647708514558ba2ae4cb247dc |
| publicationDate |
2009-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2009208885-A1 |
| titleOfInvention |
Exposure apparatus, exposure method, and device manufacturing method |
| abstract |
An exposure apparatus includes a first optical member from which an exposure beam is emitted; a first object movable at a light-exit side of the first optical member; a second object movable, independently of the first object, at the light-exit side of the first optical member; and a driving unit that moves the first object and the second object in a first direction within a predetermined plane including a first position opposing the first optical member in a state in which the first object and the second object are close to or in contact with each other and in which positions of the first object and the second object in a second direction within the predetermined plane are shifted. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8446569-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10684562-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018039190-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009225288-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10698326-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011008717-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11656556-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11442371-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102018132001-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8932042-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10775708-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8797508-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11435672-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020119863-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11385557-B2 |
| priorityDate |
2006-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |