| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5e5e4671b3ba1fd59502c47747a80896 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70925
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03B27-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70341 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-52 |
| filingDate |
2010-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea87654e4b14223dbe14ca2b69818533
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25775afe1ed433cc9c2eb9ca3616aea3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfe851c45853dd0c83d85b3d7a723b55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41fe695437191a99d97f892f4035f80e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_630c7c86082fbf641ca8c0a604699a2a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f05d1f3438d1adc0cf2f6eab10165537
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b98b9f373290515211d225d86e9b0825
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8602059c41c4650a9e5bf91bbedf15c |
| publicationDate |
2010-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010328634-A1 |
| titleOfInvention |
Lithographic apparatus and a method of operating the apparatus |
| abstract |
A method of cleaning an immersion lithographic apparatus is disclosed in which a cleaner is added to immersion liquid for use during exposure of a substrate. The cleaner may be a combination of a soap and a solvent. The cleaner maybe present at a concentration of less than 300 ppb. |
| priorityDate |
2009-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |