http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1498778-A1

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publicationDate 2005-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1498778-A1
titleOfInvention Lithographic apparatus and device manufacturing method
abstract A lithographic projection apparatus wherein a liquid supply system provides a space 2nbetween a final element of a projection system PL and a substrate W with liquid. Thenliquid supply system comprises a seal member 4. A liquid seal is formed by the flow ofnliquid from an inlet 6 to an outlet 8 of the seal member.
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Total number of triples: 52.