http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02054
Outgoing Links
| Predicate | Object |
|---|---|
| concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| level | 11^^<http://www.w3.org/2001/XMLSchema#integer> |
| symbol | H01L21/02054 |
| modified | 2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| title | Cleaning before device manufacture, i.e. Begin-Of-Line process combining dry and wet cleaning steps |
| type | http://data.epo.org/linked-data/def/cpc/SubGroup |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02043 |
Incoming Links
Total number of triples: 629.