Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68764 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02087 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02054 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02307 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6875 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6704 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
filingDate |
2019-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8db8a686f8ba663df0b117b048671b94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_229ff91a47110f02c680e08c99e429d7 |
publicationDate |
2019-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20190093130-A |
titleOfInvention |
Substrate processing method and substrate processing apparatus |
abstract |
The substrate processing method includes a substrate holding step of holding the substrate by a substrate holder which is provided on an upper surface of the base and horizontally holds the substrate at an interval from the upper surface of the base, and a processing liquid is applied to the upper surface of the substrate. By supplying a liquid to the liquid film forming step of forming a liquid film of the processing liquid on the upper surface of the substrate, and heating the space between the substrate and the heater unit provided between the substrate and the base and the space between the substrates. The liquid film on the substrate in a state in which the substrate is heated so that the temperature of the substrate is equal to or higher than the boiling point of the processing liquid by filling and heating the fruit by the heater unit; An opening forming step of forming an opening in a central region of the substrate, and rotating the base along a vertical direction While rotating the substrate at a rotation axis, the peripheral includes the opening-up step to expand the opening. The said liquid-tight heating process is performed in parallel with the said opening expansion process in the period of at least one part of the said opening expansion process. |
priorityDate |
2018-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |