http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150107663-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02101 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02054 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02079 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02049 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2015-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_357f162becdd0ca0ee9479a013207021 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8541687be6a795047f8d6cf8bc353916 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2882eb72b6106fac26df909835bf945a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5de0f8583c713f724b1ac0db2f06a0f3 |
| publicationDate | 2015-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20150107663-A |
| titleOfInvention | Separation and regeneration apparatus and substrate processing apparatus |
| abstract | The present invention aims at reliably removing liquid on a wafer (W), reducing the operation cost, and removing F ions. The separating and regenerating apparatus comprises a supercritical processing unit (3) for producing a mixed gas having a first fluorine-containing organic solvent having a first boiling point and a second fluorine-containing organic solvent having a second boiling point lower than the first boiling point, Hot water 34W having a temperature between the boiling point of the first boiling point and the boiling point of the second boiling point 34W is accommodated and the mixed gas is introduced into the hot water 34W to obtain the first fluorinated organic solvent of liquid form and the second fluorinated organic solvent of the gaseous form And a distillation tank 34 for separating. An introducing line 50 for introducing the mixed gas from the supercritical processing unit 3 to the distillation tank 34 is provided and the leading end 50a of the introducing line 50 is disposed in the hot water 34W. |
| priorityDate | 2014-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.