| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_41e00307d71a7333061f80cc9032f076
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2010-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef84ee8e2122752f5964534cacd6d602
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c81d96104f33d5c410fa1a600e019c2d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9dd23dbd6b50221bfb9088c92f155d61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_121876c355b0bd3605207c728698d901
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ba0d6fb2b0ab48ae09a1d5d50cb3269 |
| publicationDate |
2011-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2011187570-A |
| titleOfInvention |
Supercritical processing apparatus and supercritical processing method |
| abstract |
The present invention provides a supercritical processing apparatus and a supercritical processing method that suppress the occurrence of pattern collapse and the incorporation of a substance constituting a processing liquid into a substrate. A processing container contains a substrate to be processed with a supercritical fluid, and a liquid supply unit supplies a processing liquid containing a fluorine compound into the processing container. The fluid discharge unit discharges the supercritical fluid from the processing container, and the thermal decomposition component exclusion unit excludes a component that promotes thermal decomposition of the liquid from the processing container or the liquid supplied from the liquid supply unit. The heating unit heats the treatment liquid containing a fluorine compound that is hydrofluoroether or hydrofluorocarbon. [Selection] Figure 2 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015189697-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014022566-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220065052-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9881784-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013206957-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015135942-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10115609-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10096462-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160048652-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7307575-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016086072-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017084901-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023153222-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10566182-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150107632-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150107663-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150107638-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10998186-B2 |
| priorityDate |
2010-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |