| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b840b7871b8c6f9979970f0238bfc2bc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G28-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02054
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-17 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2018-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2021-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bc2104e72270e1ab1b4d65876d44afe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0302762ce9c8f0fa688f148412a1ac62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_690b08ca15dc5d754cb6763fad76f8ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aaefa7821fd83a5fc6232b2422be24bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b67e0eefd81231793a6b8caee37933b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16e5c929f899e0a8a65264f476cb17be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64c894ba263213b63b7b8ee6ba307686
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7675bd3dc2e7782aa800a1b1bb5f48aa |
| publicationDate |
2021-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-11170989-B2 |
| titleOfInvention |
Gallium arsenide substrate comprising a surface oxide layer with improved surface homogeneity |
| abstract |
The present invention relates to a novel provided gallium arsenide substrates as well as the use thereof. The gallium arsenide substrates provided according to the invention exhibit a so far not obtained surface quality, in particular a homogeneity of surface properties, which is detectable by means of optical surface analyzers, by way of example by means of ellipsometric lateral substrate mapping for optical contact-free quantitative characterization. |
| priorityDate |
2013-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |