http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170044968-A

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publicationDate 2017-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20170044968-A
titleOfInvention Method of cleaning a substrate and fabrication method of semiconductor device using the same
abstract The present invention relates to a cleaning method for a substrate, comprising: providing a substrate comprising a metal material film; Performing physical cleaning on the substrate; Performing chemical cleaning on the substrate; And drying the surface of the substrate. With the cleaning method of the present invention, particles of all sizes can be effectively removed and damage to the features formed on the substrate can be minimized.
priorityDate 2015-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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