| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3455 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 |
| filingDate |
2001-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5f85df8d707ad15398a9581eaabc09e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d10ff3bddec13ea3a8e5567e564b05f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ea8d90469aaa19efb3dddac7a8b2d19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bb652fe22917cd1c011bd868b5006e2 |
| publicationDate |
2004-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6790323-B2 |
| titleOfInvention |
Self ionized sputtering using a high density plasma source |
| abstract |
A magnetron especially advantageous for low-pressure plasma sputtering or sustained self-sputtering having reduced area but full target coverage. The magnetron includes an outer pole face surrounding an inner pole face with a gap therebetween. The outer pole of the magnetron of the invention is smaller than that of a circular magnetron similarly extending from the center to the periphery of the target and has a substantially larger total magnetic intensity. Thereby, sputtering at low pressure and high ionization fraction is enabled. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9771648-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006066248-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005051424-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007080056-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007181417-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7335282-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010326815-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7674707-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009166865-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7563672-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9123508-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006289291-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8647486-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315771-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014017906-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007119701-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010170780-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802578-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007111506-A1 |
| priorityDate |
1999-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |