http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S62230971-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f97f0fa258a008bf056ad04b7f380dda |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 1986-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e988471dcd31bff87a8e4ad32de51dec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_186eb0e1226d104b47c74c9d2c2fdcd9 |
| publicationDate | 1987-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S62230971-A |
| titleOfInvention | Device for sputtering magnetron |
| abstract | PURPOSE: To optionally change composition ratio of an alloy thin film by transferring a permanent magnet within a plane parallel to the face of a divided target plate by means of a driving mechanism. n CONSTITUTION: A target plate 3 is fitted to one side face of a housing 4 for a target which is opposed to a base plate 2. A permanent magnet 5 is provided to the rear face side of the target plate 3. A rotary shaft 6 is fitted to the rear face of this magnet 5 in an eccentric position. The other end of the rotary shaft 6 perforates the wall of the housing 4 and a motor 7 is connected to the projecting end thereof via a driving gear 9. The target plate 3 is divided into materials A, B. When rotating the rotary shaft 6, the magnet 5 is eccentrically rotated and an evaporation source on the surface of the target plate 3 is made to a doughnut-like, and a thin film wherein the ratio of alloy composition is continuously changed by means of the position of the magnet 5 is formed. n COPYRIGHT: (C)1987,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6790323-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6290825-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-90183-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9347131-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013540899-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019216331-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6497802-B2 |
| priorityDate | 1986-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104727 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419583196 |
Total number of triples: 22.