Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_59f2c67504ec58c4e1e8591218e5b29f http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a36968f03a618b3216081925702f4a3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9e979e5d364f2d49bb8774b0895ee08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d6a7a2299a34c4fa565464f6bab44e8f |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3408 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 |
filingDate |
2004-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2008-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a56a1ebbd58845c0419af7ec1a693ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fbdfcacf6b8c72e85b0cf94d0922224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fafc2c22d2fad3afade29e6ddcd27ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4327b8c1617470fa3b09bc025497e7e0 |
publicationDate |
2008-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-7335282-B2 |
titleOfInvention |
Sputtering using an unbalanced magnetron |
abstract |
A sputtering process and magnetron especially advantageous for low-pressure plasma sputtering or sustained self-sputtering, in which the magnetron has a reduced area but full target coverage. The magnetron includes an outer pole face surrounding an inner pole face with a gap therebetween. The outer pole of the magnetron of the invention is smaller than that of a circular magnetron similarly extending from the center to the periphery of the target and has a substantially larger total magnetic intensity. Thereby, sputtering at low pressure and high ionization fraction is enabled. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8968536-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010170780-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008308416-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8647486-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010230274-A1 |
priorityDate |
1999-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |