http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2241710-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3903f3f7af75b538a3346b1b315c5a5d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3426 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3408 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
| filingDate | 1991-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eee6abf442c82486c041ff1bbe57072d |
| publicationDate | 1991-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | GB-2241710-A |
| titleOfInvention | Magnetron sputtering of magnetic materials in which magnets are unbalanced |
| abstract | A magnetron for sputtering of magnetic materials has a ferromagnetic core with an unbalanced arrangement of magnets providing a plasma entrapping field over the target. In an unbalanced magnetron the magnets of one polarity are not balanced by magnets of the opposite polarity of an equal total strength. The unbalanced arrangement enables the ferromagnetic target to be used without any artificial non-uniformity being introduced into the target to provide the field lines above it. In an unbalanced magnetron some lines of force tend to travel outside the target disc above its surface, in contradistinction to a balanced magnetron where the lines of force tend to travel within the target disc when it is of magnetic material, and thus are useful to effect the plasma (Fig. 4). <IMAGE> |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5736019-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7115194-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6171461-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6790323-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011060748-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19827587-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6306265-B1 |
| priorityDate | 1990-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419580429 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24726 |
Total number of triples: 23.