| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3408 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 |
| filingDate |
2004-09-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59f2c67504ec58c4e1e8591218e5b29f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a36968f03a618b3216081925702f4a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9e979e5d364f2d49bb8774b0895ee08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6a7a2299a34c4fa565464f6bab44e8f |
| publicationDate |
2005-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2005051424-A1 |
| titleOfInvention |
Sputtering using an unbalanced magnetron |
| abstract |
A sputtering process and magnetron especially advantageous for low-pressure plasma sputtering or sustained self-sputtering, in which the magnetron has a reduced area but full target coverage. The magnetron includes an outer pole face surrounding an inner pole face with a gap therebetween. The outer pole of the magnetron of the invention is smaller than that of a circular magnetron similarly extending from the center to the periphery of the target and has a substantially larger total magnetic intensity. Thereby, sputtering at low pressure and high ionization fraction is enabled. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101573667-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010264016-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012027954-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007111506-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8568572-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103038864-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9347129-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103003915-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012012458-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7563672-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10573500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013086466-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11043365-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9005414-B2 |
| priorityDate |
1999-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |