Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cf2371783736cf47eacc33db0b537d9e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb58b7c2b2aed892cf182d5611a3e321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4fa0fae1dde6a64092c91b45f5345814 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_099413ae0cf5a2b6398b5151766cd260 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02107 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4485 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-044 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-04 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
filingDate |
2010-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2014-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13802cdb9258f8231b36859422b49060 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1c25353f3e527ed7ab5820656299289 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c45fddd08dac8b1cb055f07faec563e7 |
publicationDate |
2014-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-8876975-B2 |
titleOfInvention |
Thin film deposition apparatus |
abstract |
A thin film deposition apparatus can be simply applied to produce large-sized display devices on a mass scale and improves manufacturing yield. The thin film deposition apparatus for forming a thin film on a substrate includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; wherein each of the patterning slits includes a plurality of sub-slits. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10286416-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018209039-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017001259-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019226078-A1 |
priorityDate |
2009-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |