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publicationDate 2011-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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titleOfInvention Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
abstract A thin film deposition apparatus includes an electrostatic chuck that fixes a substrate on which a deposition material is to be deposited; a blocking member disposed at a side of the substrate fixed on the electrostatic chuck and covering at least a portion of the substrate; and a deposition unit including a chamber and a thin film deposition assembly disposed in the chamber and to deposit a thin film on the substrate fixed on the electrostatic chuck.
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