| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37eca35591a598b124616f188740caf8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4485 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 |
| filingDate |
2010-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37a33d286acf65530b3fb690e9c5081b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8245da41a0341ede29e834c77252c75e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_faffafcf2d3a79d87ab16fb5d271a82c |
| publicationDate |
2011-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011088622-A1 |
| titleOfInvention |
Thin film deposition apparatus |
| abstract |
A thin film deposition apparatus can be simply applied to produce large-sized display devices on a mass scale and improves manufacturing yield. The thin film deposition apparatus for forming a thin film on a substrate includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; and a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits arranged in the first direction; wherein each of the patterning slits includes a plurality of sub-slits. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022145463-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9660191-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9453282-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8876975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010307409-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013337588-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9172064-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107946479-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109563618-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018016947-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8882920-B2 |
| priorityDate |
2009-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |