http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8536057-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f67e8bfc4910b72e8bc4549ca8fb29e1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_28501f954c9df862ce5ed9bcba36863e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_099413ae0cf5a2b6398b5151766cd260 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49a41fd39a675c70492b8760a4ff422f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 |
| filingDate | 2010-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3db0ef0c4e436f7e9dd2eb6b513d0f12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae10db9f54a2c84516b901cb3a4f293f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb3781294f9beb529b9cc6f060c989e9 |
| publicationDate | 2013-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8536057-B2 |
| titleOfInvention | Thin film deposition apparatus and method of manufacturing organic light emitting device by using the same |
| abstract | A thin film deposition apparatus and a method of manufacturing an organic light emitting device (OLED) using the thin film deposition apparatus. The thin film deposition apparatus includes a deposition source; a first nozzle in which a plurality of first slits are formed in one direction; a second nozzle in which a plurality of second slits are formed in the one direction; a second nozzle frame combined with the second nozzle to support the second nozzle; a first barrier wall assembly including a plurality of first barrier walls disposed in the one direction to form a space between the first nozzle and the second nozzle; and a second barrier wall assembly having a plurality of second barrier walls disposed in the one direction and a second barrier wall frame to support the second barrier walls, the second barrier wall assembly disposed at one side of the first barrier wall assembly, wherein the second barrier walls are mounted on the second barrier wall frame in the one direction and the second barrier walls slide on the second barrier wall frame. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9224591-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011088622-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8876975-B2 |
| priorityDate | 2009-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 58.