patent/US-2004142108-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004142108-A1

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filingDate	2003-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8281f9c68e8650a9b55206301c42166c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a2ed1c1e97500f76f912bf9ba831e11
publicationDate	2004-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2004142108-A1
titleOfInvention	Mask vapor deposition method, mask vapor deposition system, mask, process for manufacturing mask, apparatus for manufacturing display panel, display panel, and electronic device
abstract	A method includes a step of attracting a glass substrate 20 that is a subject for deposition using the electrostatic attraction of a stage 1, a step of aligning the attracted glass substrate with a deposition mask 2, and a step of evaporating an organic compound that is a deposition material, used for forming electroluminescent elements so as to deposit the compound on the glass substrate 20. An electrostatic chucking function is provided to the deposition mask according to needs, whereby the adhesion is enhanced.
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Incoming Links

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Total number of triples: 169.