| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2006-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f75f9080019d14cc20383864802f823
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1dc42e31462821b98575e03f49a179c |
| publicationDate |
2010-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7718006-B2 |
| titleOfInvention |
Mask holding structure, film forming method, electro-optic device manufacturing method, and electronic apparatus |
| abstract |
A mask includes a base plate having aperture parts, and chips having aperture patterns and positioned in the aperture parts of the base plate. The mask is arranged on a bottom surface of a bed plate with a substrate on which a film is to be formed sandwiched therebetween. Magnets are arranged on the bed plate, and plugs which are attracted to the magnets are arranged in the base plate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9045818-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011174217-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010025237-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015101536-A1 |
| priorityDate |
2005-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |