| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4fa0fae1dde6a64092c91b45f5345814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ea6e85469c3549d0008805734edda752
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d618b354025438c0c2b706f256f8c5e1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a4ee892c344f973470baca87cbc7a929
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_21336b8d843f262d24d9a386dead1e13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e75f1443494079bbd6eb0a9673a8009f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_099413ae0cf5a2b6398b5151766cd260 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-35 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2010-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2014-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63c567e7a681138eb2c787b03e6df5de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06e88077f5da39268b94f6396448a84e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51f4248d211af4e4419adf072ff9a50e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c789592dff41e97b217eccfd01920d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39b7e03ecf04b864cf08dacc2e8c1846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f849ee4417a9cdb5926a85f7f243ab23 |
| publicationDate |
2014-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8709161-B2 |
| titleOfInvention |
Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
| abstract |
A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device using the thin film deposition apparatus. The thin film deposition apparatus includes a plurality of thin film deposition assemblies, each of which includes: a deposition source that discharges a deposition material; a deposition source nozzle unit that is disposed at a side of the deposition source and includes a plurality of deposition source nozzles; a patterning slit sheet that is disposed opposite to the deposition source nozzle unit and includes a plurality of patterning slits arranged in a first direction; and a barrier plate assembly that is disposed between the deposition source nozzle unit and the patterning slit sheet, in the first direction. The barrier plate assembly includes a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8876975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011088622-A1 |
| priorityDate |
2009-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |