Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dbc2f0a4ddba5859c54a6aafc3deb0b9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4fb457264d3f5dddd78de2ee6eb9c0a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_099413ae0cf5a2b6398b5151766cd260 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ea6e85469c3549d0008805734edda752 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9fefc26db07b24c79625a9c768a8db39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e75f1443494079bbd6eb0a9673a8009f http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a4ee892c344f973470baca87cbc7a929 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K59-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0011 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-3244 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56 |
filingDate |
2010-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2015-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33f76b0ce556f4f9abe51424997c9a7e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f29afe1d4084098b1a886d44ef1a63e9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11e561aebd82c0c47ded78ff43bc408b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bad56e63297abe1545268e9f4fcab8b4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_523889eccc071bc75cddfdff24da5a09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8567b6784511e4cd7370547d5427e3c6 |
publicationDate |
2015-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-8968829-B2 |
titleOfInvention |
Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same |
abstract |
A thin film deposition apparatus that can be applied to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019226078-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011165327-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10246769-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10158074-B2 |
priorityDate |
2009-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |