| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc4959f5dd6065724ffd21292b1ce17c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ead90443277482e25bf91bfddef2b5a7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-56 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 |
| filingDate |
2003-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d74364d23ef02fc6a4d20c0fcdcb283e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c1c4698d3b83378de9372a3cc6841a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13df22b684312fac4d8c25bf5b3a8890
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ef2a007976e291b4d2ba68469585449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4bd38fdb0e3712738fe3df5ba141b08 |
| publicationDate |
2007-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1418250-B1 |
| titleOfInvention |
Vacuum evaporator |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8973525-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102010007111-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8968829-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011095594-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8790750-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8882921-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8882556-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8859325-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8876975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9279177-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8882920-B2 |
| priorityDate |
2002-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |