patentcpc/C23C16-45548

http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45548

Outgoing Links

Predicate	Object
concordantIPC	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
level	13^^<http://www.w3.org/2001/XMLSchema#integer>
symbol	C23C16/45548
modified	2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
title	Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
type	http://data.epo.org/linked-data/def/cpc/SubGroup
broader	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544

Incoming Links

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Total number of triples: 598.