Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45548 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
filingDate |
2011-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2016-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_962db38beab3f9ccdae62ad77e43705a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a56630e4b292b928af2af4e7699687ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74269cefd1302c083f912f9be1e99325 |
publicationDate |
2016-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-I530583-B |
titleOfInvention |
Film forming device and film forming method |
priorityDate |
2010-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |