http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2065
Outgoing Links
| Predicate | Object |
|---|---|
| concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| level | 11^^<http://www.w3.org/2001/XMLSchema#integer> |
| symbol | G03F7/2065 |
| modified | 2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| title | Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a scanning corpuscular radiation beam, e.g. an electron beam using corpuscular radiation other than electron beams |
| type | http://data.epo.org/linked-data/def/cpc/SubGroup |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2059 |
Incoming Links
Total number of triples: 157.