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filingDate 2012-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3aa197a0faee499992f0da36115aa856
publicationDate 2014-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2014102420-A
titleOfInvention Developer and pattern forming method using the same
abstract A developer for a photosensitive resist material comprising an aqueous solution containing 0.1 to 10% by mass of one or more guanidines. By performing development using the developer of the present invention, it is possible to suppress swelling during development, suppress pattern collapse and occurrence of bridge defects, and obtain a pattern with small edge roughness. [Selection figure] None
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