http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019159749-A1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-16 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
filingDate | 2019-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2021-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-WO2019159749-A1 |
titleOfInvention | Water-repellent protective film forming agent, chemical solution for forming water-repellent protective film, and surface treatment method for wafers |
abstract | The present invention comprises a new water-repellent protective film-forming agent or a new chemical for forming a water-repellent protective film for forming a water-repellent protective film on the surface of a wafer containing a silicon element, and the agent in a liquid state or the same. A method for surface treatment of a wafer using a chemical solution is provided. The water-repellent protective film-forming agent of the present invention is at least one silicon compound selected from the group consisting of a guanidine derivative represented by the following general formula [1] and an amidine derivative represented by the following general formula [2]. Is. [Chemical 9] [Chemical 10] |
priorityDate | 2018-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 285.