| abstract |
A resist composition having; (A1) a resin having a structural unit represented by the formula (I), (A2) a resin having a structural unit represented by the formula (II) and being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid and not including the structural unit represented by the formula (I) and (B) an acid generator. n n n n n n n n n n n n wherein R 1 , A 1 , A 13 , X 12 , A 14 , R 3 and ring X 1 are defined in the specification. |